Experimental challenges for approaching local strain determination
In this paper, the Raman intensity enhancement induced bynanoprobes (metal particles and metallized tips) in the vicinity ofa strained silicon sample surface is reported. For silvernanoparticles deposited directly onto silicon, high enhancements inthe vicinity of particles were observed. Furthermore, metallizedtips were scanned inside the spot of a laser used for
the Raman measurements. Both silver coated and pure silver tips,mounted to a tuning fork, indicated high Raman signal enhancementfor optimized tip position within the laser spot. Atomic ForceMicroscopy (AFM) scanning on a structured sample was conducted toinvestigate the stability of these tips. Focused Ion Beam (FIB)milling was utilized to refine and to re-sharpen pure silver tipsafter the measurements. Complementary measurements were performedusing pure tungsten tips. Because of the high hardness of W wires,a special pre-etch technique was applied.
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